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Thermal process tube Product List

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Quartz glass products for thermal processes

We provide semiconductor products that meet advanced demands with cutting-edge measurement technology and proven processing techniques!

We handle thermal process products essential for CVD processes and oxidation/diffusion processes that meet requirements such as high heat resistance, high purity, and particle prevention, including tubes and boats. In response to demands for larger sizes, we have realized large-diameter quartz glass components such as tubes and flanges exceeding φ1000mm. We respond to advanced requests with cutting-edge measurement technology and proven processing techniques. 【Product Examples】 ■ Tubes ■ Flanges ■ Large Flanges (Opaque) *For more details, please download the PDF or feel free to contact us.

  • tube
  • Other semiconductors
  • Contract manufacturing
  • Thermal process tube

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